PROFACTOR has extensive experience in coatings for NIL and focuses on:

Coatings

HMNP-12- Adhesion Layer for Nanoimprint Materials

Adhesion Layer for Working Stamp Materials
In the last years a lot of effort was put into the development of working stamp materials for Nanoimprint Lithography. There are different types of working stamp materials like Ormoceres or Perfluorinated Polyether (PFPE). For all those materials an adhesion promoter is needed to improve the adhesion of the working stamp material to the backplane of Silicon, Quartz or Glass.

Drop & Spin
Our adhesion promoter is spin-coated onto the glass or silicon backplane. Just put your backplane in your coating equipment, dispense HMNP-12 and turn on your spin coater. After softbake the backplane is ready for working stamp replication. Low viscosity, less water sensitivity HMNP-12 provides an adhesion layer of few nm on your glass or silicon substrate. It is in comparison to other products less sensitive to water film on your substrates and humidity in air.

Properties

  • Fast and easy to apply
  • Low viscosity
  • Few nanometer thin layer
  • Adhesion promoter for PFPE materials as well as Ormoceres
  • Cost efficient
  • No special care needed regarding humidity in air
  • No special treatment of backplane before applying HMNP-12
  • Works on Silicon as well as Quartz and Glass

Anti Sticking Layer for Nanoimprint Stamps BGL-GZ-96

This product is available from July 1st, 2024.

The easiest Anti Sticking Layer for your Stamps
A critical step in a replication or Nanoimprint process is the separation of stamp and substrate after resist curing. To avoid sticking of the resist and stamp, the total surface energy of the stamp has to be minimized.

Sticky stamps?
BGL-GZ-96 provides a fast and easy anti-coating of your stamp. It has been tested for a broad range of applications, like the replication of microoptic devices.

Drop and Spin
BGL-GZ-96 is spin-coated in one minute onto a stamp, which is ready to use after 8 hours. Just put your stamp in your coating equipment, dispense BGL-GZ-96 and turn on your spin coater.
3 hours vs. 2 minutes
For BGL-GZ-96 only a spin coater is needed. Conventional anti-sticking layers have to be deposited from the vapor phase which takes several hours and requires sophisticated experimental setups.
DATA & FACTS

  • Fast and easy to apply
  • Decreased stamp surface energy
  • Minimal sticking of resist to stamp
  • Cost efficient
  • Only a spin coater is needed
  • Process at room temperature
  • Process can be performed in air
  • From micrometer to nanometer applications*
  • BGL-GZ-96 is available in different size glass bottles, standard size is 250 ml

*) please test BGL-GZ-96 for suitability first, before applying it on an expensive master

Ihr Ansprechpartner

Hannes Fachberger
Functional Surfaces and Nanostructures

+43 7252 885 410
hannes.fachberger@nullprofactor.at