Step & Repeat NIL Lab Tools

Step & Repeat Technology

Step&Repeat Nanoimprinting (S&R NIL) is a semi-automated process for the fast and cost-effective replication of a small- sized die in a fast and cost-effective way.

This process is very flexible and can be used for a wide range of feature sizes, from some nanometers up to a few hundred micrometers.

 

Step & Repeat Lab-Tools

Based on our extensive experience in nanoimprinting research, we have developed specific Step& Repeat tools for laboratory use.

These tools are easy to operate and allow direct process observation.

• Multitool for the replication of microstructures with in-situ resist application
• Soft-NIL-Stepper for the replication of nanostructures on a pre-coated substrate

The tools can be customised to your needs.

You can learn more and gain detailed insight into all functions of the tools during a hands-on workshop in our lab.

Multitool

The multitool enables the fast and precise multiplication of micro- and nanostructures, whereby the resist is applied individually for each imprint.

Advantages

Small footprint. Simple operation and intuitive software.

Specifications

• 4-axis system
• Substrate heating
• Resist dispenser
• Microscope camera
• High-power UV LED module

Soft NIL-Stepper

For the replication of nanostructures.

Specifications

• Up to 360 imprints per hour (depending on material)
• Easy handling and membrane change
• High-performance UV LED module for curing
• Vacuum table for easy mounting of substrates, for example:
  • 100 mm wafer
  • 1inch × 1 inch glass
  • Up to A5 substrate size
• Stage movement (X-Y-Z): 150mm x 150mm x 70mm
• Stamp size up to 15mm x 15 mm

Fields of application

• Research and development laboratories
• Investigation of die life and material properties
• Manufacturing of large-area multi-master templates
• Manufacturing of large quantities of small NIL components